Sputtering targets
We provide a variety of sputtering targets for forming precious metal thin films. Besides your size and shape requests, we respond to the requirements for structural refinements. In addition, we recollect and recycle used sputtering targets.
Physical properties of sputtering target materials (reference)
| Melting point (℃) | Density (g/cm3) | Purity (wt%) | |
|---|---|---|---|
| Au | 1064 | 19.32 | 99.99 or higher |
| Ag | 962 | 10.50 | 99.99 or higher |
| Pt | 1769 | 21.45 | 99.95 or higher |
| Pd | 1552 | 12.02 | 99.95 or higher |
- For alloy types, please consult us separately.
Examples of actual sizes of sputtering targets
Round plates
| Diameter | Thickness | ||
|---|---|---|---|
| Min. (mm) | Max. (mm) | Min. (mm) | Max. (mm) |
| 50 | 440 | 1 | 8 |
Rectangular plates
| Outer dimensions | Thickness | ||
|---|---|---|---|
| Min. (mm) | Max. (mm) | Min. (mm) | Max. (mm) |
| 5×75 | 250×430 | 1 | 17 |
- Because the available sizes depend on the material and shape, please consult us. For other details, please contact us.
Example of sectional structure of Au sputtering target
