Sputtering targets

We provide a variety of sputtering targets for forming precious metal thin films. Besides your size and shape requests, we respond to the requirements for structural refinements. In addition, we recollect and recycle used sputtering targets.

Physical properties of sputtering target materials (reference)

Melting point (℃) Density (g/cm3) Purity (wt%)
Au 1064 19.32 99.99 or higher
Ag 962 10.50 99.99 or higher
Pt 1769 21.45 99.95 or higher
Pd 1552 12.02 99.95 or higher
  • For alloy types, please consult us separately.

Examples of actual sizes of sputtering targets

Round plates

Diameter Thickness
Min. (mm) Max. (mm) Min. (mm) Max. (mm)
50 440 1 8

Rectangular plates

Outer dimensions Thickness
Min. (mm) Max. (mm) Min. (mm) Max. (mm)
5×75 250×430 1 17
  • Because the available sizes depend on the material and shape, please consult us. For other details, please contact us.

Example of sectional structure of Au sputtering target